Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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05/14/1996
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Application #:
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08269863
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Filing Dt:
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06/30/1994
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Inventors:
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MICHAEL J. BALCONI-LAMICA, STEVEN G. BARBEE, TONY F. HEINZ, YIPING HSIAO, LEPING LI et al
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Title:
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CONTACTLESS REAL-TIME IN-SITU MONITORING OF A CHEMICAL ETCHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| DALE M. CROCKATT |
| IBM CORPORATION |
| INTELLECTUAL PROPERTY LAW DEPT. |
| 1580 ROUTE 52 |
| HOPEWELL JUNCTION, NY 12533-6531 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2070 ROUTE 52 |
| HOPEWELL JUNCTION, NEW YORK 12533 |
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| HESLIN ROTHENBERG FARLEY & MESITI P.C. |
| 5 COLUMBIA CIRCLE |
| ALBANY, NY 12203 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PO BOX 309 |
| UGLAND HOUSE |
| GRAND CAYMAN, CAYMAN ISLANDS KY1-1104 |
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| HESLIN ROTHENBERG FARLEY & MESITI P.C. |
| 5 COLUMBIA CIRCLE |
| ALBANY, NY 12203 |
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