Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/1996
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Application #:
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08262840
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Filing Dt:
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06/21/1994
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Inventors:
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SEIJI NISHIZAWA, TOKUJI TAKAHASHI, RYO HATTORI
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Title:
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METHOD AND APPARATUS FOR MEASURING THICKNESSES OF LAYERS OF A MULTIPLE LAYER SEMICONDUCTOR FILM UTILIZING THE COMPARISON BETWEEN A SPATIALGRAM AND AN OPTICAL CHARACTERISTIC MATRIX
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 2-CHOME CHIYODA-KU, TOKYO 100, JAPAN |
| TOKYO 100,, JAPAN |
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| LEYDIG, VOIT & MAYER |
| SUITE 300 |
| 700 THIRTEENTH STREET, N.W. |
| WASHINGTON, D.C 20005 |
| ATTN: JEFFREY A. WYAND |
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