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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/25/1996
Application #:
08398086
Filing Dt:
03/03/1995
Inventor:
RICK A. LUTZ
Title:
METHOD FOR WAFER SCRUBBING
Assignment: 1
Reel/Frame:
010567/0903Recorded: 02/07/2000Pages: 4
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
11/25/1992
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
MARTINE PENILLA & KIM, LLP
ANTHONY JOSEPHSON
710 LAKEWAY DRIVE, SUITE 170
SUNNYVALE, CA 94086

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