Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/06/1996
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Application #:
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08343961
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Filing Dt:
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11/17/1994
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Inventors:
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YUJI CHIBA, SHINICHI HARA
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Title:
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MASK HOLDING METHOD, MASK AND MASK CHUCK, EXPOSURE APPARATUS USING THE MASK AND THE MASK CHUCK, AND DEVICE PRODUCTION METHOD USING THE EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| STEVEN E. WARNER |
| 277 PARK AVENUE |
| NEW YORK, NY 10172-0194 |
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