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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/17/1996
Application #:
08398667
Filing Dt:
03/03/1995
Inventors:
MAKOTO HASEGAWA, HIROMI SAKIMA, HIROMITSU KANBARA, YOSHIO ISHIKAWA, YASUO IMAMURA et al
Title:
PLASMA ETCHING APPARATUS
Assignment: 1
Reel/Frame:
007464/0283Recorded: 05/03/1995Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
04/24/1995
Exec Dt:
04/20/1995
Exec Dt:
04/20/1995
Exec Dt:
04/20/1995
Exec Dt:
04/20/1995
Exec Dt:
04/20/1995
Assignees:
3-6 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107
72 HORIKAWA-CHO, SAIWAI-KU
KAWASAKI-SHI, JAPAN
Correspondent:
MARVIN J. SPIVAK
OBLON, SPIVAK, MCCLELLAND, ET AL
1755 JEFFERSON DAVIS HIGHWAY
FOURTH FLOOR
ALINGTON, VA., 22202

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