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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
5565034
Issue Dt:
10/15/1996
Application #:
08331083
Filing Dt:
10/28/1994
Inventors:
MITSUHIRO NANBU, NARUAKI IIDA, HIDEAKI GOTOU, MASANORI TATEYAMA, YUJI YOSHIMOTO et al
Title:
APPARATUS FOR PROCESSING SUBSTRATES HAVING A FILM FORMED ON A SURFACE OF THE SUBSTRATE
Assignment: 1
Reel/Frame:
007208/0059Recorded: 10/28/1994Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NANBU, MITSUHIRO
Exec Dt:
10/14/1994
IIDA, NARUAKI
Exec Dt:
10/14/1994
GOTOU, HIDEAKI
Exec Dt:
10/14/1994
TATEYAMA, MASANORI
Exec Dt:
10/14/1994
YOSHIMOTO, YUJI
Exec Dt:
10/14/1994
ISHIMOTO, TOMOKO
Exec Dt:
10/14/1994
YAEGASHI, HIDETAMI
Exec Dt:
10/17/1994
KAWAKAMI, YASUNORI
Exec Dt:
10/14/1994
FUKUDA, TAKAHIDE
Exec Dt:
10/14/1994
FUJIMOTO, AKIHIRO
Exec Dt:
10/14/1994
TAKEKUMA, TAKASHI
Exec Dt:
10/14/1994
MATSUKAWA, HIROYUKI
Exec Dt:
10/14/1994
Assignees:
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME MINATO-KU
TOKYO 107, JAPAN
TOKYO ELECTRON KYUSHU LIMITED
1375-41, NISHI-SHINMACHI
TOSU-SHI, SAGA-KEN, 841, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, MAIER &
NEUSTADT, P.C.
C. IRVIN MCCLELLAND
1755 JEFFERSON DAVIS HIGHWAY, 4TH FL.
ARLINGTON, VA 22202
Assignment: 2
Reel/Frame:
009453/0220Recorded: 09/10/1998Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
TOKYO ELECTRON KYUSHU LIMITED
Exec Dt:
05/13/1998
Assignee:
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME
MINATO-KU, TOKYO 107, JAPAN
Correspondent:
OBLON, SPIVAK, MCCLELLAND, ET AL.
MARVIN J. SPIVAK
FOURTH FLOOR
1755 JEFFERS0N DAVIS HIGHWAY
ARLINGTON, VA 22202

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