Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/22/1996
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Application #:
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08280823
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Filing Dt:
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07/26/1994
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Inventor:
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NAOTO SANO
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Title:
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SCANNING EXPOSURE APPARATUS AND METHOD INCLUDING CONTROLLING IRRADIATION TIMING OF AN IRRADIATION BEAM WITH RESPECT TO RELATIVE MOVEMENT BETWEEN THE BEAM AND A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, OHTA-KU TOKYO, JAPAN |
| TOKYO, JAPAN |
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| STEVEN E. WARNER |
| FITZPATRICK, CELLA, HARPER & SCINTO |
| 277 PARK AVENUE |
| NEW YORK, NY 10172-0194 |
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