Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/19/1996
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Application #:
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08402486
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Filing Dt:
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03/10/1995
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Inventors:
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MOTOSUKE MIYOSHI, YUICHIRO YAMAZAKI
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Title:
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WAFER PATTERN DEFECT DETECTION METHOD AND APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72, HORIKAWA-CHO, SAIWAI-KU, KAWASAKI-SHI |
| KANAGAWA-KEN, JAPAN |
| JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL |
| MARVIN J. SPIVAK |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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