Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/26/1996
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Application #:
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08412088
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Filing Dt:
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03/27/1995
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Inventors:
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ROGER PATRICK, FRANK BOSE, PHILIPPE SCHOENBORN, HARRY TODA
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Title:
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COIL CONFIGURATIONS FOR IMPROVED UNIFORMITY IN INDUCTIVELY COUPLED PLASMA SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538-6470 |
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| LAM RESEARCH CORPORATION |
| 4650 CUSHING PARKWAY CA-1 |
| FREMONT, CA 94538 |
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