Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/1996
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Application #:
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08475002
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Filing Dt:
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06/07/1995
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Inventors:
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CHUNG CHAN, RYNE C. ALLEN, IMAD HUSEIN, YAUNZHONG ZHOU
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Title:
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METHOD FOR THE DEPOSITION AND MODIFICATION OF THIN FILMS USING A COMBINATION OF VACUUM ARCS AND PLASMA IMMERSION ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 360 HUNTINGTON AVE. |
| BOSTON, MASSACHUSETTS 02115 |
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| STANLEY M. SCHURGIN |
| WEINGARTEN, SCHURGIN, GAGNEBIN & HAYES |
| TEN POST OFFICE |
| BOSTON, MA 02109 |
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