Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/03/1996
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Application #:
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08341081
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Filing Dt:
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11/17/1994
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Inventors:
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YOSHIHISA MATSUBARA, SHINYA ITO
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Title:
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PROCESS FOR FORMING A PLANARIZED INTERLAYER INSULATING FILM IN A SEMICONDUCTOR DEVICE USING A PERIODIC RESIST PATTERN
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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7-1, SHIBA 5-CHOME |
MINATO-KU |
TOKYO, JAPAN |
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WHITHAM, CURTIS, WHITHAM & MCGINN |
JOYCE KEEN |
11800 SUNRISE VALLEY DR. |
SUITE 900 |
RESTON, VA 22091 |
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