Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/17/1996
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Application #:
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08283152
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Filing Dt:
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08/03/1994
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Inventors:
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KOUICHI TANAKA, HIROMASA HASHIMOTO, FUMIO SUZUKI
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Title:
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METHOD OF POLISHING SEMICONDUCTOR WAFERS AND APPARATUS THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4-2, MARUNOUCHI 1-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN |
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| WHITHAM, CURTIS, WHITHAM & MCGINN |
| JOYCE KEEN |
| 11800 SUNRISE VALLEY DRIVE |
| SUITE 900 |
| RESTON, VA 22091 |
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