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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	5591269	Issue Dt:	01/07/1997	Application #:	08265134	Filing Dt:	06/23/1994
Inventors:	JUNICHI ARAMI, KENJI ISHIKAWA, YOUICHI DEGUCHI, HIRONORI YAGI, NOBUO KAWADA et al
Title:	VACUUM PROCESSING APPARATUS

Assignment: 1

Reel/Frame:

007115/0885

Recorded: 08/31/1994

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

ARAMI, JUNICHI

Exec Dt:

08/04/1994

ISHIKAWA, KENJI

Exec Dt:

08/04/1994

DEGUCHI, YOUICHI

Exec Dt:

08/04/1994

YAGI, HIRONORI

Exec Dt:

08/04/1994

KAWADA, NOBUO

Exec Dt:

08/16/1994

YANAGISAWA, ISAO

Exec Dt:

08/16/1994

Assignees:

TOKYO ELECTRON LIMITED

2-3-1, NISHI-SHINJUKU, SHINJUKU-KU

TOKYO, JAPAN

TOKYO ELECTRON TOHOKU LIMITED

52 AZAMATSUNAGANE, IWAYADO, ESASHI-SHI, IWATE-KEN

JAPAN

SHIN-ETSU CHEMICAL CO., LTD.

6-1, OHTEMACHI 2-CHOME CHIYODA-KU

TOKYO, JAPAN

Correspondent:

GRAHAM & JAMES

HISAKO MURAMATSU, ESQ.

801 S. FIGUEROA ST., 14TH FL.

LOS ANGELES, CA 90017-5554

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