Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/07/1997
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Application #:
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08484020
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Filing Dt:
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06/07/1995
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Inventor:
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PETER J. SCHILLER
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Title:
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SINGLE CRYSTAL SILICON DRY-ETCH ENDPOINT BASED ON DOPANT-DEPENDENT AND THERMALLY-ASSISTED ETCH RATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2800 OLD SHAKOPEE ROAD |
| BLOOMINGTON, MINNESOTA 55425 |
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| KINNEY & LANGE, P.A. |
| MICHAEL R. BINZAK |
| 625 FOURTH AVENUE SOUTH |
| SUITE 1500 |
| MINNEAPOLIS, MINNESOTA 55415-1659 |
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