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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/04/1997
Application #:
08333004
Filing Dt:
11/01/1994
Inventors:
ROBERT WU, GERALD Z. YIN
Title:
INDUCTIVELY ENHANCED REACTIVE ION ETCHING
Assignment: 1
Reel/Frame:
007382/0549Recorded: 03/06/1995Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/15/1995
Exec Dt:
02/14/1995
Assignee:
S AVENUE M/S #2634
SANTA CLARA,, CALIFORNIA
Correspondent:
APPLIED MATERIALS, INC.
PETER J. SGARBOSSA
LEGAL AFFAIRS DEPT.
3050 BOWERS AVE. M/S 2634
SANTA CLARA, CA 95054

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