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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	5607824	Issue Dt:	03/04/1997	Application #:	08281398	Filing Dt:	07/27/1994
Inventors:	JAMES T. FAHEY, BRIAN W. HERBST, LEO L. LINEHAN, WAYNE M. MOREAU, GARY T. SPINILLO et al
Title:	ANTIREFLECTIVE COATING FOR MICROLITHOGRAPHY

Assignment: 1

Reel/Frame:

Recorded: 09/19/1994

Pages: 7

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

Exec Dt:

07/26/1994

Exec Dt:

07/27/1994

Exec Dt:

07/26/1994

Exec Dt:

07/26/1994

Exec Dt:

07/26/1994

Exec Dt:

08/11/1994

Exec Dt:

07/26/1994

Assignee:

OLD ORCHARD ROAD

ARMONK, NEW YORK 10504

Correspondent:

DALE M. CROCKATT

IBM CORPORATION, INTELLECTUAL PROP. LAW

DEPT., DEPT. 18G/BLDG. 300-482

1580 ROUTE 52

HOPEWELL JUNCTION, NY 12533-6531

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