Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/04/1997
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Application #:
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08404718
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Filing Dt:
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03/15/1995
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Inventors:
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AKIO YAMADA, HIROSHI YASUDA
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Title:
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ELECTRON-BEAM EXPOSURE METHOD AND SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1015, KAMIDODANAKA, NAKAHARA-KU |
| KAWASAKI-SHI, KANAGAWA, 211 JAPAN |
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| ARMSTRONG, WESTERMAN, HATTORI ET AL |
| WILLIAM F. WESTERMAN |
| SUITE 1000 |
| 1725 K STREET, N.W. |
| WASHINGTON, D.C. 20006 |
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