Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/01/1997
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Application #:
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08382973
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Filing Dt:
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02/03/1995
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Inventors:
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MICHAEL W. CRESSWELL, RICHARD A. ALLEN, JOSEPH J. KOPANSKI, LOREN W. LINHOLM
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Title:
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METHOD AND REFERENCE STANDARDS FOR MEASURING OVERLAY IN MULTILAYER STRUCTURES, AND FOR CALIBRATING IMAGING EQUIPMENT AS USED IN SEMICONDUCTOR MANUFACTURING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NATIONAL INSTITUTE OF STANDARDS |
| 14TH AND CONSTITUTION |
| WASHINGTON, DISTRICT OF COLUMBIA 20230 |
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| NATIONAL INSTITUTE OF STANDARDS & TECH. |
| MARCIA SALKELD |
| BUILDING 820, ROOM 213 |
| GAITHERSBURG, MARYLAND 20899 |
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