Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/15/1997
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Application #:
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08415937
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Filing Dt:
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04/03/1995
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Inventors:
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TSUNEO TERASAWA, SHINJI OKAZAKI, MINORU TORIUMI
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Title:
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PATTERN FORMING METHOD AND PROJECTION EXPOSURE TOOL THEREFOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH ST., STE. 1800 |
| ARLINGTON, VA. 22209 |
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