Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/06/1997
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Application #:
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08568371
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Filing Dt:
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12/06/1995
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Inventors:
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TOSHIYA MIYAZAKI, TOSHIHIRO HAYAMI, TADAO NAKATSUKA, HIROYUKI TANAKA et al
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Title:
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METHOD FOR DETECTING ETCHING ENDPOINT AND ETCHING APPARATUS AND ETCHING SYSTEM USING THE METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-33, KITAHAMA 4-CHOME, CHUO-KU, OSAKA-SHI |
| OSAKA, 541, JAPAN |
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| BURNS, DOANE, SWECKER & MATHIS, L.L.P. |
| CHARLES F. WIELAND III |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6, AKASAKA 5-CHOME |
| TOKYO 107-8481, JAPAN |
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| BURNS, DOANE, SWECKER ET AL. |
| PLATON N. MANDROS |
| PO BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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