Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/06/1997
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Application #:
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08398825
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Filing Dt:
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03/06/1995
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Inventor:
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HIROSHI MAEDA
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Title:
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A POSTEXPOSURE BAKING APPARATUS FOR FORMING FINE RESIST PATTERN APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, |
| TOKYO 100 JAPAN |
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| GENE Z. RUBINSON |
| LOWE, PRICE, LEBLANC & BECKER |
| 99 CANAL CENTER PLAZA, SUITE 300 |
| ALEXANDRIA, VA 22314 |
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