Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/20/1997
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Application #:
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08410726
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Filing Dt:
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03/27/1995
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Inventors:
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TETSUO AOYAMA, RIEKO NAKANO, AKIRA ISHIHAMA, KOICHIRO ADACHI
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Title:
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STRIPPING AND CLEANING AGENT FOR REMOVING DRY-ETCHING AND PHOTORESIST RESIDUES FROM A SEMICONDUCTOR SUBSTRATE, AND A METHOD FOR FORMING A LINE PATTERN USING THE STRIPPING AND CLEANING AGENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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| 22-22, NAGAIKECHO, ABENO-KU |
| OSAKA, JAPAN |
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| WADDELL A. BIGGART |
| SUGHRUE, MION, ZINN, MACPEAK & SEAS |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, D.C. 20037-3202 |
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