Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/01/1997
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Application #:
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08661897
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Filing Dt:
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06/12/1996
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Inventors:
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MARIKO SHIMOMURA, NAOTO MIYASHITA, HIROYUKI OHASHI
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Title:
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CHEMICAL-MECHANICAL POLISHING (CMP) METHOD FOR CONTROLLING POLISHING RATE USING IONIZED WATER, AND CMP APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 72 HORIKAWA-CHO, SAIWAI-KU |
| KAWASAKI-SHI, JAPAN |
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| FINNEGAN, HENDERSON, FARRABOW, |
| GARRETT & DUNNER, L.L.P. |
| MR. ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005 |
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