Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/08/1997
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Application #:
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08561731
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Filing Dt:
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11/22/1995
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Inventors:
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TADAO MATSUNAGA, TAKAYA MATSUSHITA, KEI HATTORI
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Title:
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ELECTROSTATIC CHUCKING DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CHUO-KU |
5-15, KYOBASHI 1-CHOME |
TOKYO, JAPAN |
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CHUO-KU |
72, HORIKAWA-CHO, SAIWAI-KU |
KAWASAKI-SHI, KANAGAWA-KEN, JAPAN |
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LOWE, PRICE, LEBLANC & BECKER |
ROBERT L. PRICE |
99 CANAL CENTER PLAZA |
SUITE 300 |
ALEXANDRIA, VA 22314 |
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