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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/08/1997
Application #:
08561731
Filing Dt:
11/22/1995
Inventors:
TADAO MATSUNAGA, TAKAYA MATSUSHITA, KEI HATTORI
Title:
ELECTROSTATIC CHUCKING DEVICE
Assignment: 1
Reel/Frame:
007832/0406Recorded: 02/20/1996Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/06/1995
Exec Dt:
11/06/1995
Exec Dt:
11/09/1995
Assignees:
CHUO-KU
5-15, KYOBASHI 1-CHOME
TOKYO, JAPAN
CHUO-KU
72, HORIKAWA-CHO, SAIWAI-KU
KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Correspondent:
LOWE, PRICE, LEBLANC & BECKER
ROBERT L. PRICE
99 CANAL CENTER PLAZA
SUITE 300
ALEXANDRIA, VA 22314

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