Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/22/1997
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Application #:
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08410724
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Filing Dt:
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03/27/1995
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Inventors:
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JOERN DIERKS, JUERGEN MAIER
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Title:
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MERCURY VAPOR HIGH-PRESSURE DISCHARGE LAMP AND IRRADIATION METHOD, PARTICULARLY FOR MASK PATTERN EXPOSURE OF SEMICONDUCTOR WAFERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| HELLABRUNNER STRASSE 1 |
| MUNICH, GERMANY D-815 |
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| STEPHEN H. FRISHAUF |
| FRISHAUF, HOLTZ, GOODMAN & WOODWARD, PC |
| 767 THIRD AVENUE, 25TH FLOOR |
| NEW YORK, NY 10017-2023 |
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