Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/05/1997
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Application #:
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08506664
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Filing Dt:
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07/25/1995
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Inventors:
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CHARLES DRILL, MILIND G. WELING
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Title:
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CHEMICAL MECHANICAL POLISHING SYSTEM AND METHOD FOR OPTIMIZATION AND CONTROL OF FILM REMOVAL UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL DEPARTMENT, MS/45 |
| 1109 MCKAY DRIVE |
| SAN JOSE, CALIFORNIA 95131 |
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| WILLIAM G. BECKER, ESQ. |
| VLSI TECHNOLOGY, INC. |
| 1109 MCKAY DRIVE |
| LEGAL DEPARTMENT, MS-45 |
| SAN JOSE, CALIFORNIA 95131 |
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