Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/12/1997
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Application #:
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08612652
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Filing Dt:
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03/08/1996
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Inventors:
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VINCENT E. BURKHART, MICHAEL N. SUGARMAN, HOWARD E. GRUNES
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Title:
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WAFER SPACING MASK FOR A SUBSTRATE SUPPORT CHUCK AND METHOD OF FABRICATING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| LEGAL DEPARTMENT |
| MAIL STOP 2061 |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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