Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08636929
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Filing Dt:
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04/24/1996
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Inventors:
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GIL S. LEE, JOHO SONG
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Title:
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LOW-TEMPERATURE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON OXIDE FILMS AND FLUORINATED SILICON OXIDE FILMS USING DISILANE AS A SILICON PRECURSOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OFFICE OF TECHNOLOGY TRANSFER |
| 203 DAVID BOYD, LOUISIANA STATE UNIVERSITY |
| BATON ROUGE, LOUISIANA 70803 |
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| TAYLOR, PORTER, BROOKS & PHILLIPS, LLP |
| JOHN H. RUNNELS |
| P.O. BOX 2471 |
| BATON ROUGE, LA 70821 |
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