Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/23/1997
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Application #:
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08620184
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Filing Dt:
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03/22/1996
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Inventors:
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YUAN-CHANG HUANG, SHZH-KUEI YEN
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Title:
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PROCESS FOR CLEANING AN ELECTROSTATIC CHUCK OF A PLASMA ETCHING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121, PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NEW YORK 12603 |
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