Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/14/1997
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Application #:
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08755551
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Filing Dt:
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11/22/1996
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Inventors:
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KEIICHI HARASHIMA, TAKESHI AKIMOTO
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Title:
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ELECTROSTATIC CHUCK WITH MECHANISM FOR LIFTING UP THE PERIPHERAL OF A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-1, SHIBA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| SUGHURE, MION, ZINN, MACPEAK & SEAS |
| J. FRANK OSHA |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, D.C. 20037-3202 |
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