Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/21/1997
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Application #:
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08580723
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Filing Dt:
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01/02/1996
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Inventors:
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MICHAEL S. BARNES, ARTHUR K. YASUDA
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Title:
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METHOD OF IN SITU CLEANING A VACUUM PLASMA PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| LOWE, PRICE, LEBLANC & BECKER |
| ALLAN M. LOWE |
| 99 CANAL CENTER PLAZA, SUITE 300 |
| ALEXANDRIA, VA 22314 |
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