Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/21/1997
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Application #:
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08471103
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Filing Dt:
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06/06/1995
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Inventors:
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JOSEPH E GORTYCH, ALAN E. ROSENBLUTH
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Title:
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METHOD AND SYSTEM FOR OPTIMIZING ILLUMINATION IN AN OPTICAL PHOTOLITHOGRAPHY PROJECTION IMAGING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| IBM MICROELECTRONICS |
| LAWRENCE H. MEIER |
| INTELLECTUAL PROPERTY LAW |
| 1000 RIVER STREET |
| ESSEX JUNCTION, VT 05452 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OLD ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| LAWRENCE H. MEIER |
| IBM MICROELECTRONICS |
| INTELLECTUAL PROPERTY LAW |
| 1000 RIVER STREET |
| ESSEX JUNCTION, VERMONT 05452 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3800 |
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