Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/04/1997
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Application #:
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08480174
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Filing Dt:
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06/07/1995
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Inventors:
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XUE-YU QIAN, ARTHUR H. SATO
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Title:
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INDUCTIVELY COUPLED RF PLASMA REACTOR WITH FLOATING COIL ANTENNA FOR REDUCED CAPACITIVE COUPLING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| PETER SGARBOSSA, ESQ. |
| M/S 2061 |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CA 95054 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE M/S 2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| ROBERT M. WALLACE |
| 3050 BOWERS AVENUE M/S 2061 |
| SANTA CLARA, CA 95054 |
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