Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/06/1998
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Application #:
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08529635
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Filing Dt:
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09/18/1995
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Inventors:
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CHIEN-FONG CHEN, CHIA-CHUN CHENG, CHI-FU CHANG, KUO-SHENG CHUANG
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Title:
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SEMICONDUCTOR SUBSTRATE DRY CLEANING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 121, PARK AVENUE 3 SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NEW YORK 12603 |
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