Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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01/06/1998
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Application #:
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08539198
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Filing Dt:
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10/04/1995
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Inventors:
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RALF DIETRICH, GERHARD FRANZ
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Title:
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METHOD FOR DRY ETCHING OF A SEMICONDUCTOR SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| POSTFACH 22 16 34 |
| ZFE GR PA 3 |
| MUENCHEN, GERMANY 80506 |
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| LERNER AND GREENBERG |
| LAURENCE A. GREENBERG |
| P.O. BOX 2480 |
| HOLLYWOOD, FL 33022 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1389 MOFFETT PARK DRIVE |
| SUNNYVALE, CALIFORNIA 94089 |
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| ERIC L. MASCHOFF |
| 60 E. SOUTH TEMPLE |
| SUITE 1000 |
| SALT LAKE CITY, UT 84111 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1105 NORTH MARKET STREET |
| SUITE 1300 |
| WILMINGTON, DELAWARE 19801 |
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| ERIC L. MASCHOFF / MASCHOFF BRENNAN |
| 1389 CENTER DRIVE |
| SUITE 300 |
| PARK CITY, UT 84098 |
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