Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/20/1998
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Application #:
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08625485
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Filing Dt:
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03/29/1996
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Inventors:
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STEVE GHANAYEM, MORIS KORI, MAITREYEE MAHAJANI, RAVI RAJAGOPALAN
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Title:
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"NON-PLASMA HALOGENATED GAS FLOW TO PREVENT METAL RESIDUES"
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SUNNYVALE, CALIFORNIA 95054 |
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APPLIED MATERIALS, INC. |
MICHAEL B. EINSCHLAG |
PATENT COUNSEL MS/2061 |
3050 BOWERS AVE., P.O. BOX 450A |
SANTA CLARA, CA 95054 |
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