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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
5711812
Issue Dt:
01/27/1998
Application #:
08469401
Filing Dt:
06/06/1995
Inventors:
DAVID L. CHAPEK, SUSAN B. FELCH, MICHAEL W. KISSICK, SHAMIM M. MALIK, TIENYU T. SHENG
Title:
APPARATUS FOR OBTAINING DOSE UNIFORMITY IN PLASMA DOPING (PLAD) ION IMPLANTATION PROCESSES
Assignment: 1
Reel/Frame:
007631/0016Recorded: 08/28/1995Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHAPEK, DAVID LEROY
Exec Dt:
06/09/1995
FELCH, SUSAN BENJAMIN
Exec Dt:
06/05/1995
KISSICK, MICHAEL WILLIAM
Exec Dt:
06/09/1995
MALIK, SHAMIM MUHAMMAD
Exec Dt:
06/09/1995
SHENG, TIENYU TERRY
Exec Dt:
06/05/1995
Assignee:
VARIAN ASSOCIATES, INC.
3100 HANSEN WAY, LEGAL DEPT. E-339
PALO ALTO, CALIFORNIA 94304
Correspondent:
VARIAN ASSOCIATES, INC.
SARA K. DOE
LEGAL DEPARTMENT M/S 339
3100 HANSEN WAY
PALO ALTO, CA 94304
Assignment: 2
Reel/Frame:
010024/0960Recorded: 05/10/1999Pages: 22
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
VARIAN ASSOCIATES, INC.
Exec Dt:
04/06/1999
Assignee:
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
WOLF, GREENFIELD & SACKS, P.C.
WILLIAM R. MCCLELLAN
FEDERAL RESERVE PLAZA
600 ATLANTIC AVENUE
BOSTON, MA 02210

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