Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/24/1998
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Application #:
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08780258
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Filing Dt:
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01/02/1997
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Inventor:
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WHIKUN YI
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Title:
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IMPROVED CONSTRUCTION OF A CHAMBER CASING IN A PLASMA ETCHING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, PALDAL-GU |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| SAMSUNG ELECTRONICS CO., LTD. |
| BRIAN C. ALTMILLER |
| 1200 NEW HAMPSHIRE AVENUE, N.W. |
| SUITE 550 |
| WASHINGTON, D.C. 20036 |
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