Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/10/1998
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Application #:
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08687365
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Filing Dt:
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08/27/1996
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Inventors:
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ULRICH BAENZIGER, GEROLD NEUMANN, HELLA-C. SCHEER
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Title:
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APPARATUS FOR GENERATING A PLASMA FOR PROCESSING SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEONRODSTRASSE 54 |
| ANGEWANDTEN FORSCHUNG E.V. |
| D-80636 MUENCHEN, GERMANY |
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| KARL HORMANN, ESQ. |
| 86 SPARKS STREET |
| CAMBRIDGE, MA 02138-2216 |
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