Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/17/1998
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Application #:
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08315837
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Filing Dt:
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09/30/1994
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Inventors:
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SUSUMU SAITO, CHISHIO KOSHIMIZU, KAZUO EGUCHI, YOUICHI DEGUCHI, KIMIHIRO HIGUCHI
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Title:
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METHOD AND DEVICES FOR DETECTING THE END POINT OF PLASMA PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME MINATO-KU |
| TOKYO 107, JAPAN |
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| 2381-1 KITAGEJO, FUJII-MACHI, NIRASAKI-SHI |
| YAMANASHI 407, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER |
| & NEUSTADT, P.C. - VINCENT J. SUNDERDICK |
| 1755 JEFFERSON DAVIS HWY., FOURTH FLOOR |
| ARLINGTON, VIRGINIA 22202 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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| OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT |
| MARVIN J. SPIVAK |
| 1755 JEFFERSON DAVIS HIGHWAY |
| FOURTH FLOOR |
| ARLINGTON, VA 22202 |
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