Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/14/1998
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Application #:
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08497461
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Filing Dt:
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06/30/1995
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Inventor:
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ALEXANDER F. LIU
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Title:
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METHOD AND APPARATUS FOR DETECTING OPTIMAL ENDPOINTS IN PLASMA ETCH PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREEMONT, CALIFORNIA 94538 |
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| IRELL & MANELLA |
| JEFFREY J. BLATT |
| 1800 AVENUE OF THE STARS |
| SUITE 900 |
| LOS ANGELES, CA 90067-4276 |
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