Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/19/1998
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Application #:
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08389889
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Filing Dt:
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02/15/1995
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Inventors:
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HIROJI HANAWA, GERALD Z. YIN, DIANA X. MA, PHIL M. SALZMAN, PETER LOEWENHARDT, ALLEN ZHAO
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Title:
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RF PLASMA REACTOR WITH HYBRID CONDUCTOR AND MULTI-RADIUS DOME CEILING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT, M/S #2634 |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| NAOMI OBINATA |
| LEGAL AFFAIRS DEPT. |
| 3050 BOWERS AVE., M/S 2634 |
| SANTA CLARA, CA 95054 |
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