Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/19/1998
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Application #:
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08584863
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Filing Dt:
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01/11/1996
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Inventors:
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AYAKO SUGAYA, MASAHIRO NAKAGAWA, TADASHI NAGAYAMA
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Title:
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INSPECTION APPARATUS AND METHOD FOR OPTICAL SYSTEM, EXPOSURE APPARATUS PROVIDED WITH THE INSPECTION APPARATUS, AND ALIGNMENT APPARATUS AND OPTICAL SYSTEM THEREOF APPLICABLE TO THE EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| PENNIE & EDMONDS |
| CHARLES E. MILLER |
| 1155 AVENUE OF THE AMERICAS |
| NEW YORK, NY 10036 |
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