Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08563329
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Filing Dt:
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11/28/1995
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Inventors:
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YASUNARI SOHDA, YASUHIRO SOMEDA, HIROYUKI ITOH, KATSUHIRO KAWASAKI, NORIO SAITOU
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Title:
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ELECTRON BEAM WRITING METHOD AND APPARATUS FOR CARRYING OUT THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 6, KANDA SURUGADAI 4-CHOME |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT ET AL. |
| MELVIN KRAUS |
| 1300 NORTH SEVENTEENTH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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