Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08641147
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Filing Dt:
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04/25/1996
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Inventors:
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BRIAN LUE, TETSUYA ISHIKAWA, FRED C. REDEKER, MANUS WONG, SHIJIAN LI
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Title:
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SUBSTRATE SUPPORT WITH PRESSURE ZONES HAVING REDUCED CONTACT AREA AND TEMPERATURE FEEDBACK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95051 |
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| APPLIED MATERIALS, INC. |
| PATENT COUNSEL |
| 3050 BOWERS AVENUE |
| P.O. BOX 450A |
| SANTA CLARA, CA 95051 |
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