Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/21/1998
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Application #:
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08607431
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Filing Dt:
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02/27/1996
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Inventors:
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MITSUHIRO KAMEI, EIJI SETOYAMA, SATOSHI UMEHARA
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Title:
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MULTI-CHAMBER SPUTTERING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME CHIYODA-KU |
| TOKYO,, JAPAN |
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| FAY, SHARPE, BELL, FAGAN, MINNICH & |
| MCKEE, JOHN R. MATTINGLY |
| 104 EAST HUME AVENUE |
| ALEXANDRIA, VIRGINIA 22301 |
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