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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
5786276
Issue Dt:
07/28/1998
Application #:
08829683
Filing Dt:
03/31/1997
Inventors:
CYNTHIA B. BROOKS, WALTER MERRY, AJEY M. JOSHI, GLADY D. QUINNES, JITSKE TREVOR
Title:
SELECTIVE PLASMA ETCHING OF SILICON NITRIDE IN PRESENCE OF SILICON OR SILICON OXIDES USING MIXTURE OF CH3F OR CH2F2 AND CF4 AND O2
Assignment: 1
Reel/Frame:
008626/0152Recorded: 07/28/1997Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BROOKS, CYNTHIA B.
Exec Dt:
05/29/1997
MERRY, WALTER
Exec Dt:
05/27/1997
JOSHI, AJEY M.
Exec Dt:
05/27/1997
QUINONES, GLADYS D.
Exec Dt:
06/04/1997
TREVOR, JITSKE K.
Exec Dt:
05/27/1997
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
MICHAEL L SHERRARD
PATENT DEPARTMENT
P.O. BOX 450A
SANTA CLARA, CA 95052

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