Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08707491
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Filing Dt:
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09/16/1996
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Inventors:
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QUANYUAN SHANG, KAM S. LAW, DAN MAYDAN
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Title:
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DEPOSITION CHAMBER CLEANING TECHNIQUE USING A HIGH POWER REMOTE EXCITATION SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 1, 7 BAN, 2-CHOME NISHISHINJUKU |
TOKYO, JAPAN |
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FISH & RICHARDSON P.C. |
MARK D. WIECZOREK |
2200 SAND HILL ROAD, SUITE 100 |
MENLO PARK, CA 94025 |
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