Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08820502
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Filing Dt:
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04/04/1997
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Inventor:
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SABURO KAMIYA
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Title:
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METHOD AND APPARATUS FOR CORRECTING LINEARITY ERRORS OF A MOVING MIRROR AND STAGE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NISHI-OHI 1-CHOME, SHINAGAWA-KU |
| OHI PLANT, 6-3 |
| TOKYO 140, JAPAN |
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| WYATT, GERBER, MELLER AND O'ROURKE |
| MICHAEL N. MELLER |
| P.O. BOX 2198 |
| GRAND CENTRAL STATION |
| NEW YORK, NY 10163 |
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