Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08372177
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Filing Dt:
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01/12/1995
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Inventors:
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KENNETH S. COLLINS, JOSHUA CHIU-WING TSUI, DOUGLAS BUCHBERGER
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Title:
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ELECTROSTATIC CHUCK WITH POLYMERIC IMPREGNATION AND METHOD OF MAKING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| 3050 BOWERS AVENUE - M/S #0934 |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC. |
| CHARLES S. GUENZER |
| LEGAL AFFAIRS DEPARTMENT |
| 3050 BOWERS AVENUE, M/S 2634 |
| SANTA CLARA, CALIFORNIA 95054 |
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